Adaptive Tilting Angles for a Dual-Probe AFM System to Increase Image Accuracy

Journal

IEEE International Conference on Advanced Intelligent Mechatronics

Date Issued

2016

Author(s)

Lo, Yu-Ting

Jim-Wei Wu

Wei-Chih Liu

Da Wei Liu

Kuang-Yao Chang

Li-Chen Fu

DOI

10.1109/aim.2016.7576952

URI

https://scholars.lib.ntu.edu.tw/handle/123456789/429579

SDGs

[SDGs]SDG7

Type

conference paper