Flow Field and Plasma Reaction with Precursor Zinc Nitrate in a PECVD System

This study is a numerical simulation of the flow field on the deposition region and the atmospheric pressure plasma jet (APPJ) in the PECVD manufacturing process. The plasma reaction includes mutually species and different chemical reactions. When doing simulation, we utilized commercial software COMSOL Multiphysic5.2. The turbulent model is coupled with heat transfer model and chemical model. At first we analysis the configuration of flow field effect on the deposition region in the PECVD process. This model could apply on designing a system to collect the by-production for linear atmosphere pressure plasma. In continue, to verify the plasma reaction model, contrast the experimental result with simulation result. Establishing an APPJ model to simulate the downstream of fluent .The simulation result is consistence with the experiment. The visual light sudden expansion which occur at the gap is 1 mm. It could be proof this model is feasible. In the last model, we defined the specific function of electron temperature and electron density which was add measured voltage and applied power be model parameters. We compared the simulation results with experimental results, and found qualitatively similar in outlet temperature. This model could predict the excited species concentration, zinc nitrate precursor thermal decomposed to form zinc oxide and temperature distribution of mixing gas.