Contorl Relevant Issues in Semiconductor Manufacyuring--Overview with Some New Results
Resource
Control Engineering Pratice,15,1268-1279.
Journal
Control Engineering Pratice
Journal Issue
15
Pages
1268-1279
Date Issued
2007-11
Date
2007-11
Author(s)
Su, An-Jhih
Jeng, Jyh-Cheng
Huang, Hsiao-Ping
Yu, Cheng-Ching
Hung, Shih-Yu
Chao, Ching-Kong
Type
journal article