New CVD Precursors Capable of Depositing Copper Metal under Mixed O2/Ar Atmosphere

Resource

Inorganic Chemistry 44 (20): 7226-7233

Journal

ChemInform

Date Issued

2005

Date

2005

Author(s)

Lay, Eddy

Song, Yi-Hwa

Chiu, Yuan-Chieh

Lin, Yang-Miin

Chi, Yun

Carty, Arthur J.

Peng, Shie-Ming

Lee, Gene-Hsiang

DOI

URI

Type

journal article

File(s)

Name

409.pdf

Size

391.04 KB

Format

Adobe PDF

Checksum

(MD5):8b99aedd651f1dcce432e22978111d65