Radially-segmented micromirror with surface shaping ability
Journal
2016 IEEE Intl. Conf. on Optical MEMS and Nanophotonics
Pages
PD-1
Date Issued
2016
Author(s)
Abstract
We propose a radially-segmented micromirror with surface shaping ability. It is designed to combine the scanning and variable focusing functions, which is useful for applications such as optical imaging.
Type
conference paper