Fabrication of microlens arrays using UV micro-stamping with soft roller and gas-pressurized platform

Resource

Microelectronic Engineering 85 (3): 603-609

Journal

Microelectronic Engineering

Journal Volume

85

Journal Issue

3

Pages

603-609

Date Issued

2008-03

Date

2008-03

Author(s)

Cheng, Fang-Sung

Xu, Shu-Wen

Huang, Po-Hsun

Huang, Tzu-Chien

URI

Type

journal article

File(s)

Name

02.pdf

Size

2.42 MB

Format

Adobe PDF

Checksum

(MD5):978044e708118eb2c8bad62ceb2c85c8