Fabrication of Nanoscale PtOx/PZT/PtOx Capacitors by E-beam Lithography and Plasma Etching with Photoresist Mask

Resource

Electrochemical and Solid State Letter 9 (3): C51-C53

Journal

Electrochemical and Solid State Letter

Journal Volume

9

Journal Issue

3

Pages

-

Date Issued

2006

Date

2006

Author(s)

Huang, Chun-Kai

Chen, Yen-Hua

Liang, Yuan-Chang

Wu, Tai-Bor

Chao, Wen-Chi

URI

Type

journal article

File(s)

Name

20.pdf

Size

280.58 KB

Format

Adobe PDF

Checksum

(MD5):c46c2c985e8764f40d5171acef23e7e1