A Method Using V-Groove to Monitor the Thickness of Silicon Membrane with Micrometer Resolution
Resource
Journal of Micromechanics and Microengineering,8,182-187.
Journal
Journal of Micromechanics and Microengineering
Journal Issue
8
Pages
182-187
Date Issued
1998-09
Date
1998-09
Author(s)
Yang, Lung-Jieh