Discharge Factor of Semiconductor Industry in Taiwan
Date Issued
2007
Date
2007
Author(s)
Lin, Yen-Chin
DOI
zh-TW
Abstract
The main goal of this research was to compare the difference between actual quantity and estimates, and to demonstrate with the waste discharge factors of seminconductor industry built by EPA. In terms of the material flow balance, the discharge model of hazardous waste according to quantity of materials, products and waste were evaluated by regression analysis. In this research, two representative companies were selected to be the subject. But there was difference among those factories with products and processes. So, the percentage and variation of different materials were compared with each other in this process of estimation. And the correlation between them and capacity of the two companies was analysed and the models were corrected subject to the deviation.
According to the results, there were many differences between models of company A and company B. But there were also a few common parameters between them, for instance, the quantity of cupric sulfate used was the common parameter of total quantity of hazardous waste discharge; total quantity of organic additive per unit product was the common parameter of the quantity of waste liquor which pH value was less than (or equal to) 2.0; the quantity of phosphonate therapy and cupric sulfate used were the common parameters of the quantity of waste liquor which flash point was less than 60℃. So, the correlation was present between the parameters. The results of estimation showed that the more vary of additives rate used, the more diverse between actual discharge of hazardous waste and estimative one.
Because the percentage of total quantity of hazardous waste discharge from advanced I.C. porocessing of semiconduct industry was high, the results of estimation will be more complete and accurate if the integral parameters of feed and output are applied to the mass flow analysis for standardized regression model. Thus, the function of industrial waste management system will be expandable and useful to decrease the risk of hazardous waste management.
Subjects
半導體產業
有害事業廢棄物
產出參數
產出模式
單位產品之有害廢棄物產出量
有害廢棄物產出總量
產能
semiconductor industry
hazardous waste
discharge parameter
discharge model
quantity of hazardous waste discharge per unit product
total quantity of hazardous waste discharge
capacity
Type
thesis