Multi-layer bottom antireflective coating structures for high NA ArF exposure system applications

Journal

Proceedings of SPIE-The International Society for Optical Engineering

Journal Volume

4690 II

Pages

1085-1092

Date Issued

2002

Author(s)

Chen, H.L.

Fan, W.

Wang, T.J.

Huang, T.Y.

DOI

10.1117/12.474184

URI

https://scholars.lib.ntu.edu.tw/handle/123456789/491383

URL

https://www.scopus.com/inward/record.uri?eid=2-s2.0-0036031355&doi=10.1117%2f12.474184&partnerID=40&md5=fadc41ae50311c72a2d2839091b3e718

Type

journal article