Development of a simple system for the simultaneous measurement of pitch, yaw and roll angular errors of a linear stage
Journal
International Journal of Advanced Manufacturing Technology
Journal Volume
26
Journal Issue
7-8
Pages
808-813
Date Issued
2005
Author(s)
Abstract
A simple measurement system has been developed and implemented for the simultaneous measurement of pitch, yaw and roll of the moving axes of a linear stage. This developed system is based on the principle of the diffractive theorem and optical triangulation. It is composed of a laser source, two quadrant detectors and a diffracting grating. The diffraction grating mounted on the moving axes of a stage reflects an incident laser beam into several diffractive rays and two quadrant detectors are set up for detecting the position of ±1st-order diffraction rays. When the diffraction grating moves, the locations where the diffractive beams are generated change and also the positions of the spots on two quadrant detectors. According to the relationship between the three angular motions of a moving stage and the output coordinates of two quadrant detectors, an inverse algorithm is used to solve these pitch, yaw and roll angular errors through a kinematic analysis . ? Springer-Verlag London Limited 2005.
Subjects
Algorithms
Detectors
Diffraction gratings
Error analysis
Geometry
Inverse kinematics
Optical systems
Error verification
Geometric errors
Quadrant detectors
Metric system
Type
journal article