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College of Electrical Engineering and Computer Science / 電機資訊學院
Photonics and Optoelectronics / 光電工程學研究所
Study on 193-nm immersion interference lithography
Details
Study on 193-nm immersion interference lithography
Journal
Photonics West
Date Issued
2005-01
Author(s)
L. A. Wang,
W. C. Chang,
K. Y. Chi,
S. K. Liu,
C. D. Lee,
LON A. WANG
URI
http://scholars.lib.ntu.edu.tw/handle/123456789/317933
Type
conference paper