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College of Electrical Engineering and Computer Science / 電機資訊學院
Electrical Engineering / 電機工程學系
聚焦氦離子束微影與鄰近效應修正技術
Details
聚焦氦離子束微影與鄰近效應修正技術
Journal
機械工業雜誌
Journal Issue
435
Pages
15-23
Date Issued
2019
Author(s)
李建霖
蔡坤諭
錢盛偉
KUEN-YU TSAI
URI
https://www.AiritiLibrary.com/Publication/Index/P20171221002-201906-201906030011-201906030011-15-23
https://scholars.lib.ntu.edu.tw/handle/123456789/555255
Publisher
Publisher: 財團法人工業技術研究院
Type
journal article