Growth of nano-sized copper seed layer on TiN and TaSiN by new non-toxic electroless plating

Resource

Nanotechnology, 2002. IEEE-NANO 2002. Proceedings of the 2002 2nd IEEE Conference on

Journal

2nd IEEE Conference on Nanotechnology

Pages

-

Date Issued

2002-08

Date

2002-08

Author(s)

Liu, R.S.

You, C.C.

Tsai, M.S.

Hu, S.F.

Lee, K.

Lu, J.

DOI

DOI

N/A

URI

Type

journal article

File(s)

Name

01032113.pdf

Size

428.42 KB

Format

Adobe PDF

Checksum

(MD5):b8e6d409f6d7c820aa53d7f7c4388571