Longitudinal stitching of sub-micron periodic fringes on a roller
Journal
Microelectronic Engineering
Journal Volume
88
Journal Issue
11
Pages
3235-3243
Date Issued
2011
Author(s)
Chen, L.-S.
Yen, J.-Y.
Chen, Y.-P.
Wang, L.A.
Chung, T.-T.
Lin, H.-I.
Chen, P.-H.
Chang, S.-H.
Type
journal article