Longitudinal stitching of sub-micron periodic fringes on a roller
Journal
Microelectronic Engineering
Journal Volume
88
Journal Issue
11
Pages
3235-3243
Date Issued
2011
Author(s)
Chen, L.-S.
Yen, J.-Y.
Chen, Y.-P.
Wang, L.A.
Chung, T.-T.
Lin, H.-I.
Chen, P.-H.
Chang, S.-H.
Abstract
In this work, a servo-assisted system for fabricating sub-micron gratings on a roller-type mold is developed. The fringes are produced by optical interference lithography and have period of about 800 nm. A supporting and precision manipulating system for roller mold is established so that seamless longitudinal fringe stitching can be achieved. Analysis of the measurement system and stitching error are given. Also, beam-steering concept is introduced into this system for correction of relative motion between the roller and the optical system. Exposure experiment is initiated on a 50 mm-diameter roller. The grating structure is directly and indirectly examined by microscopic equipments. © 2011 Elsevier B.V. All rights reserved.
SDGs
Type
journal article