Control relevant issues in semiconductor manufacturing: Overview with some new results

Resource

Control Engineering Practice 15 (10): 1268-1279

Journal

Control Engineering Practice

Journal Volume

15

Journal Issue

10

Pages

1268-1279

Date Issued

2007

Date

2007

Author(s)

Su, An-Jhih

Jeng, Jyh-Cheng

Huang, Hsiao-Ping

Yu, Cheng-Ching

Hung, Shih-Yu

Chao, Ching-Kong

URI

Type

journal article

File(s)

Name

25.pdf

Size

432.37 KB

Format

Adobe PDF

Checksum

(MD5):ee43f7f7a1794856a2af7cd239cc3f90