Design of Collaborative Engineering Data System (CEDS): an application case of process integration

Resource

Semiconductor Manufacturing, 2005. ISSM 2005, IEEE International Symposium on

Journal

Semiconductor Manufacturing, 2005. ISSM 2005, IEEE International Symposium on

Pages

-

Date Issued

2005-09

Date

2005-09

Author(s)

Fan, Chih-Min

Chang, Shi-Chung

Chang, Henry

DOI

DOI

N/A

URI

Type

journal article

File(s)

Name

01513292.pdf

Size

477.33 KB

Format

Adobe PDF

Checksum

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