WNxCy VT Tuning of Split Gate Nanosheet CFETs with Dual Work Function Metals Achieving 0.93 VT Match/ Improved 0.24V Noise Margin/ Record Gain of 61V/V

Part Of

Technical Digest - International Electron Devices Meeting, IEDM

Start Page

1

End Page

4

ISBN (of the container)

979-835036542-9

Date Issued

2024-12-07

Author(s)

Bo-Wei Huang

Chun-Yi Cheng

Wan-Hsuan Hsieh

Yu-Rui Chen

Wei-Jen Chen

Yi-Chun Liu

Min-Kuan Lin

Ying-Qi Liu

Hao-Yi Lu

Yi Huang

Ding-Wei Lin

DOI

URI

Event(s)

2024 IEEE International Electron Devices Meeting, IEDM 2024

Publisher

IEEE

Type

conference paper