適用於像散式輪廓掃描儀之電磁致動定位平台設計與開發
Other Title
Development of Electromagnetic Positioning Stagefor Astigmatic Profilometer
Date Issued
2014
Abstract
隨著科技的蓬勃發展，各類研究領域對設備的性能需求也越來越多樣化。其中3D 表面輪廓量測技術在表面觀察量測部分，可以了解表面因物理或化學作用而產生的起伏程度。DVD 像散式讀取頭具有判斷表面高低起伏的功能，近年來常應用於距離量測。此外，為了量測一定範圍的表面輪廓，致動平台的載運性能在表面輪廓儀中占有重要地位。本論文利用DVD 讀取頭的量測距離特性，結合以電磁致動原理設計的共平面雙軸致動平台，開發一體積緊緻的表面輪廓儀。電磁致動器為動圈式設計，利用導電線圈在磁場中產生的作用力來回運動，使用彈性膜做為懸吊與阻尼裝置，雙軸致動平台利用軸上兩端電磁致動器的推拉力使平台產生位移，藉由理論推導與模擬分析磁場強度、致動器出力、共振頻率與最大位移。
實驗探討電磁致動器在完整彈性膜與網狀彈性膜下對平台的影響，透過量測致動的位移量、線性度、解析度、重複性、共振頻率與交錯干擾得到平台性能。結合DVD 讀取頭與完整彈性膜雙軸致動平台之表面輪廓儀，應用於電路晶片與葉下表皮掃描，可在掃描速度20 Hz 驅動下得到掃描面積1 mm × 1 mm (500 × 500 像素)之表面輪廓。
As the well-grown of technology, manifold functions of the equipment have developed on the surface measurement. 3D surface profile measurement can detect the sample surface structure due to physical or chemical effect. DVD pick-up head possess a function of nano-scale displacement measurement by the astigmatic method. In a profilometer, furthermore, the scanner performance is the most important to measure the surface profile. This study is to design and develop a compact profilometer using a coplanar biaxial positioning stage, which are driven by electromagnetic actuators, and the astigmatic DVD pick-up head to measure the surface profile. The electromagnetic actuator is a moving-coil design, and utilizes Lorentz force to move the coil constructed with the elastic layer back and forth. Every two electromagnetic actuators construct at opposite sides of the positioning stage for actuating the sample stage. Maxwell 13 and ANSYS 13.0 are used to simulate magnetic field, force and resonant frequency of the actuators.
Experiments verify that the coplanar biaxial stage can achieve a maximum stroke exceed 1 mm. The stage integrated DVD pick-up head could scan a 1 mm × 1 mm area (500 × 500 pixels) of IC and epidermis at scanning rate 20 Hz.
Subjects
電磁式致動器
共平面架構
DVD 讀取頭
表面輪廓掃描
Type
thesis
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