Development of Electromagnetic Positioning Stage for Astigmatic Profilometer
Date Issued
2014
Date
2014
Author(s)
Chang, Biing-Chwen
Abstract
As the well-grown of technology, manifold functions of the equipment have developed on the surface measurement. 3D surface profile measurement can detect the sample surface structure due to physical or chemical effect. DVD pick-up head possess a function of nano-scale displacement measurement by the astigmatic method. In a profilometer, furthermore, the scanner performance is the most important to measure the surface profile. This study is to design and develop a compact profilometer using a coplanar biaxial positioning stage, which are driven by electromagnetic actuators, and the astigmatic DVD pick-up head to measure the surface profile. The electromagnetic actuator is a moving-coil design, and utilizes Lorentz force to move the coil constructed with the elastic layer back and forth. Every two electromagnetic actuators construct at opposite sides of the positioning stage for actuating the sample stage. Maxwell 13 and ANSYS 13.0 are used to simulate magnetic field, force and resonant frequency of the actuators.
Experiments verify that the coplanar biaxial stage can achieve a maximum stroke exceed 1 mm. The stage integrated DVD pick-up head could scan a 1 mm × 1 mm area (500 × 500 pixels) of IC and epidermis at scanning rate 20 Hz.
Subjects
電磁式致動器
共平面架構
DVD 讀取頭
表面輪廓掃描
Type
thesis
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