Low-concentration ammonia gas sensors manufactured using the CMOS-MEMS technique

Journal

Micromachines

Journal Volume

11

Journal Issue

1

Date Issued

2020

Author(s)

Shen, W.-C.

Shih, P.-J.

Tsai, Y.-C.

Hsu, C.-C.

Dai, C.-L.

DOI

10.3390/mi11010092

URI

https://www.scopus.com/inward/record.url?eid=2-s2.0-85079184428&partnerID=40&md5=ba3383ed203a5f14421e247056f1664b

https://scholars.lib.ntu.edu.tw/handle/123456789/546980

Type

journal article