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College of Science / 理學院
Applied Physics / 應用物理研究所
High performance micro-crystallized TaN/SrTiO3/TaN capacitors for analog and RF applications
Details
High performance micro-crystallized TaN/SrTiO3/TaN capacitors for analog and RF applications
Journal
2006 Symposium on VLSI Technology, 2006
Pages
102-103
Date Issued
2006
Author(s)
Chiang, KC
Huang, CC
Chin, Albert
Chen, WJ
Kao, HL
MINGHWEI HONG
Kwo, J
URI
http://scholars.lib.ntu.edu.tw/handle/123456789/323252
Type
conference paper