The effect of design/fabrication factors in nanowire biomolecules sensor
Date Issued
2012
Date
2012
Author(s)
Chen, Fa-Chun
Abstract
In recent years, the use of nanowire transistors as a new bio-molecular measurements device has became a good tool in the detection of the disease. This new biosensor could measure bio-molecular signals in a short time, also provides the advantages of high sensitivity, high selectivity, small size and probability to mass production. However, there are still some problems in this new technology need to be overcome, especially the stability and sensitivity characteristics which are the two most widely discussed. The improved methods can be broadly divided into three types, one is bio–abio interface, one is the device structure improvements, and the last one is fabrication technique.
There are two parts of discussion in this paper, the first discussion is to discuss the different structures consists of single-nanowire, multiple-nanowires and ribbon- nanowire. The second discussion is to discuss the difference between heavy ion implantation in S/D device and normal ion implantation device. Both discussions are focused on the comparison of the different bio-molecular sensing properties in these two devices. To verify the purpose of this thesis wants to achieve, the various devices are fabricated and experimentally verified. The silicon nanowire thin-film transistor is bio-functionalized to have the specific-binding to testing DNA strands, so the DNA concentration of the test. Then we use the change of the threshold voltage to analyze the sensitivity and stability of bio-molecular sensor of silicon nanowire transistors. By the two analytical results, this paper can clearly demonstrate the effect of the comparison of different structure and different ion concentration in biomolecular sensing.
Subjects
Silicon nanowire biosensor
Type
thesis
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