Numerical Analysis of Piezoelectric Micro Pump
Date Issued
2007
Date
2007
Author(s)
Lin, Li-Chih
DOI
zh-TW
Abstract
A micro-fluid system usually involves Micro Channel、Micro Valve、Micro Sensor and Micro Actuator. Moreover, micro-fluid systems may be applied in different areas after installing other units with proper designs. This study integrates and classifies the micropump into “Valve-less micro-pump” and “Valve micro-pump”, and uses CFD based computer simulations. The main idea is to develop a smaller size micro-pump with high flow rate.
This study brings up new ideas of modified valve-less micro-pump, and a valve micro-pump with “one-side actuating” piezoelectric ceramic and PDMS valves. At the first part of this study, the simulations of the related references are to verify the moving grid in the CFD software and the accuracy between the simulation and experiment results. The valve-less micropump may improve the pump flow rate with a Tesla valve, and the interaction between working frequency and the valve movement in the valve micropump are discussed. And the pump rate of valve micro-pump can reach 120ml/min with the pump diaphragm vibration frequency set to 140 Hz. The developed simulation model can be used as the tool for analyzing and improving pump performance in the future.
Subjects
微型幫浦
壓電
特斯拉閥
PDMS
動態網格
Micopump
Piezoelectric
Tesla valve
Moving grid
Type
thesis