Development of two step carbon dioxide assisted thermal fusion PMMA bonding process

Resource

MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS, 18(4), 409-414

Journal

Microsystem Technologies

Pages

409-414

Date Issued

2012

Date

2012

Author(s)

Wu, Chia-Lin

Li, Chen-Chung

Lu, Chia-Fong

DOI

URI

Type

journal article

File(s)

Name

76.pdf

Size

23.41 KB

Format

Adobe PDF

Checksum

(MD5):a0ecaab39f5cb848993adf35dc6c86ba