Study of Subwavelength Microstructures for Surface Plasmon Devices and Solar Cells
Date Issued
2006
Date
2006
Author(s)
Huang, Kai-Ting
DOI
zh-TW
Abstract
In this thesis, we have investigated the special optical properties of two-dimensional periodically structures on semiconductor substrates. For study the surface plasmon polaritons and surface reflection phenomena, the sub-wavelength structures with various period and shape were fabricated by conventional semiconductor processes. In this study, we found the optimal parameters to induce strong surface plasmon polaritons phenomena by changing the thickness of the dielectric and metal layers. By varying the shape of two-dimensional periodically structures, we found that (1) the ellipse array containing polarization effects and linear polarization of the incident light always perpendicular to the long axis of the ellipse induced highest transmission. (2) the double-hole array comprised grating mode occurring at long wavelength regime and resonance of double-hole mode occurring at short wavelength regime according to their arrangement. (3) the C-shape induced extra high transmission, and s-polarized light could induce strong surface plasmon polaritons phenomena. (4) the chiral structure possessed optical activity, and linear polarized light was rotated 8.5° by passing through two chiral structure plates.
We proposed to enhance the efficiency of the solar cells and photo detectors by utilizing surface plasmon polaritons phenomena caused high transmission on metal structures. For enhance the external quantum efficiency of solar cells, we also fabricated the sub-wavelength antireflective pyramid structures on silicon substrates by utilizing an I-line stepper with off axis illumination (OAI) technology.
Subjects
表面電漿
太陽能電池
surface plasmon
solar cell
Type
thesis
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