A novel fabrication method for suspended high-aspect-ratio microstructures

Journal

Journal of Micromechanics and Microengineering

Journal Volume

15

Journal Issue

11

Pages

2184-2193

Date Issued

2005

Author(s)

Yang, Y.-J.

Kuo, W.-C.

DOI

10.1088/0960-1317/15/11/027

URI

https://scholars.lib.ntu.edu.tw/handle/123456789/448555

URL

https://www.scopus.com/inward/record.uri?eid=2-s2.0-27144539841&doi=10.1088%2f0960-1317%2f15%2f11%2f027&partnerID=40&md5=57dc977a1662762a60cd5592567fbb18

Type

journal article