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College of Electrical Engineering and Computer Science / 電機資訊學院
Electronics Engineering / 電子工程學研究所
Density gradient minimization with coupling-constrained dummy fill for CMP control
Details
Density gradient minimization with coupling-constrained dummy fill for CMP control
Journal
International Symposium on Physical Design
Pages
105-111
Date Issued
2010
Author(s)
Chen, H.-Y.
Chou, S.-J.
YAO-WEN CHANG
DOI
10.1145/1735023.1735052
URI
http://www.scopus.com/inward/record.url?eid=2-s2.0-77952246361&partnerID=MN8TOARS
http://scholars.lib.ntu.edu.tw/handle/123456789/358169
Type
conference paper