Design and Fabrication of Micro Mechanism by Two-Photon Polymerization Technique

Two-photon polymerization (TPP) is a technique to fabricate arbitrary three dimensional (3D) structures or devices in microscale through direct laser writing (DLW) in commercially available photosensitive materials. In recent years, micro devices such as micro filter, micro grating, and micro needles have been fabricated widely. By knowing the concept of TPP, a TPP system with a picosecond laser was set up. Experiments were carried out for understanding the properties of photosensitive materials. Mechanism’s model was generated by parametric modeling technique with CAD software and then sliced into layers for DLW fabrication. Dialog program was also developed for the convenience of adjusting design parameters. During fabrication, a microscope slide was set on a movable piezo stage and with photosensitive material on it. By controlling piezo stage and laser, the focal spot of laser moved in the photosensitive resin and thus integrating structures. The results showed that micro-Geneva mechanism, micro-gear mechanism were fabricated successfully. This work shows the feasibility of fabricating sophisticated 3D micro mechanisms by TPP and will advance TPP micro fabrication. On the other hand, rotary test was carried out by using an optical tweezer and stirrer to show the movability of the micro mechanisms. Finally, the result, conclusions and suggestions are listed for consultation.