Improved near-infrared luminescence of Si-rich SiO2 with buried Si nanocrystals grown by PECVD at optimized N2O fluence

Journal

Proceedings of SPIE - The International Society for Optical Engineering

Journal Volume

5713

Pages

592-599

Date Issued

2005

Author(s)

Chen, C.-Y.

Lin, C.-J.

Kuo, H.-C.

Lin, G.-R.

Chueh, Y.-L.

Chou, L.-J.

Chang, C.-W.

DOI

10.1117/12.587997

URI

https://scholars.lib.ntu.edu.tw/handle/123456789/500159

URL

https://www.scopus.com/inward/record.uri?eid=2-s2.0-23744460665&doi=10.1117%2f12.587997&partnerID=40&md5=e26e11619f05bcca5fec4da027985484

Type

conference paper