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College of Management / 管理學院
Business Administration / 工商管理學系暨商學研究所
Statistical Monitoring of Thickness Data Using Bivariate Runs Rules
Details
Statistical Monitoring of Thickness Data Using Bivariate Runs Rules
Journal
International Symposium on Semiconductor Manufacturing
Date Issued
1998-10
Author(s)
RUEY-SHAN GUO
C. Lee
A. Chen
URI
http://scholars.lib.ntu.edu.tw/handle/123456789/343376
Type
conference paper
