半導體產業空氣污染控制技術研發-空氣離子化技術控制半導體產業揮發性有機化合物之研究
Date Issued
2003-07-31
Date
2003-07-31
Author(s)
DOI
912211E002053
Abstract
This study investigated the generation of negative air ions (NAI) by negative electric
discharge. The electric discharge was controlled at silent or dark discharge (not
corona discharge). Therefore the by-products, ozone and NOx, can be controlled at
non-detectable level. In experiments, six electrode types were conducted for threshold
voltage testing of NAI generation. The concentrations of NAI were detected at
different discharge voltages, humidities and space locations. The results show the
stainless 0.2 mm electrode can operate at the lowest threshold voltage (2.6 kV) for
NAI generation. When the operating voltage over the threshold voltage, the NAI can
be generated hugely. In the retention time experiments, the half-life of NAI was
approximately 25 sec and the maximum lifetime was about 80 sec. At 30 kV negative
electric discharge, the average NAI concentration was 1.39´106 ion/cm3 at a 30 cm
distance from discharge electrode. The experimental results show the well linear
regression between NAI concentrations and distances from discharge electrode. The
NAI concentrations displayed an exponential decay with distance in space. The
relationship equation can be showed as Y= aÿ106 EXP(- bX), (NAI concentration,Y,ion/cm3; distance, X, cm). The b constant was between 0.01 and 0.04. The a and b
constants were varied with humidity.
Subjects
air ionization
negative air ion (NAI)
lifetime
volatile organic compounds
(VOCs)
(VOCs)
semiconductor industry
cleanroom
Publisher
臺北市：國立臺灣大學環境工程學研究所
Type
report
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