Optical metrology of shape-varying nano-patterned gratings by analyzing the scattering signals in their pupil images

Journal
International Microprocesses and Nanotechnology Conference
Pages
26P-7-4
Date Issued
2011-10
Author(s)
Yen-Min Lee
Jia-Han Li
Fu-Min Wang
Hsin-Hung Cheng
Yu-Tian Shen
Kuen-Yu Tsai
Alek C. Chen
URI
Type
conference paper

臺大位居世界頂尖大學之列，為永久珍藏及向國際展現本校豐碩的研究成果及學術能量，圖書館整合機構典藏（NTUR）與學術庫（AH）不同功能平台，成為臺大學術典藏NTU scholars。期能整合研究能量、促進交流合作、保存學術產出、推廣研究成果。

To permanently archive and promote researcher profiles and scholarly works, Library integrates the services of “NTU Repository” with “Academic Hub” to form NTU Scholars.

總館學科館員 (Main Library)
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開放取用是從使用者角度提升資訊取用性的社會運動，應用在學術研究上是透過將研究著作公開供使用者自由取閱，以促進學術傳播及因應期刊訂購費用逐年攀升。同時可加速研究發展、提升研究影響力，NTU Scholars即為本校的開放取用典藏（OA Archive）平台。（點選深入了解OA）

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