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High Performance MEMS Sensor for Low Dew Point Humidity Detection
Journal
Hilton Head 2004: Solid State Sensor, Actuator, and Microsystesm Workshop
Pages
306-309
Date Issued
2004-06
Author(s)
Zribi
A. Knobloch
W. -C. Tian
G. Schultz
WEI-CHENG TIAN
Type
conference paper