Phase synchronization of micro-mirror arrays using elastic linkages
Journal
Sensors and Actuators, A: Physical
Journal Volume
95
Journal Issue
1
Pages
55-60
Date Issued
2001
Author(s)
Abstract
This paper investigates phase synchronization and concordant resonance of micro-mirror arrays and describes in detail a proposed design for a segmented micro-mirror with elastic linkages. The device replaces a conventional large area mirror, thus increasing the working frequency and allowing micro-mirror arrays to induce smaller vibration amplitude. The torsional micro-mirror array is fabricated using three conventional masks based on silicon bulk-micromachining technology. Experimental results of the prototype sample show that the phase difference among the mirror segments of the mirror array is below 1/15 cycle. © 2001 Elsevier Science Ltd. All rights reserved.
Type
journal article