Progress and Status of SiCN: a New Wide Band Gap Material

Journal

?Si-Based Materials and Devices

Pages

73-125

Date Issued

2001

Author(s)

K. H. Chen

J.-J. Wu

D. M. Bhusari

M. C. Lin

Editor(s)

H. S. Nalwa

URI

https://scholars.lib.ntu.edu.tw/handle/123456789/503880

Publisher

Academic Press

Description

Chapter 2

Type

book part