Optimization of Ohmic metal contacts for advanced GaAs-based CMOS device

Resource

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 30(2), 02B123

Journal

Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena

Pages

02B123

Date Issued

2012

Date

2012

Author(s)

Chang, W.H.

Chiang, T.H.

Lin, T.D.

Chen, Y.H.

Wu, K.H.

Huang, T.S.

Hong, M.

DOI

URI

SDGs

[SDGs]SDG7

Type

journal article

File(s)

Name

14.pdf

Size

23.45 KB

Format

Adobe PDF

Checksum

(MD5):c1c8fbe424160966c343fbf8eac952ac