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College of Electrical Engineering and Computer Science / 電機資訊學院
Photonics and Optoelectronics / 光電工程學研究所
Deep UV laser cryo-etching of GaN
Details
Deep UV laser cryo-etching of GaN
Journal
Conference on Lasers and Electro-Optics
Date Issued
1996-01
Author(s)
DING-WEI HUANG
DOI
10.1109/cleo.1997.602301
URI
http://scholars.lib.ntu.edu.tw/handle/123456789/325677
Type
conference paper