Fabrication of Gamma-Ray Irradiated Lithium Niobate Ridge Optical Waveguides Using Proton-Exchange Wet-Etching
Date Issued
2009
Date
2009
Author(s)
Chang, Chia-Hao
Abstract
In this thesis, ridge waveguides are successfully fabricated by using proton exchange wet etching in gamma ray irradiated lithium niobate (LiNbO3). In particular, the etched depths, hydrogen ion concentrations, and the aspect ratios of ridge structures are emphasized.or testing, the proton exchanged areas are obtained by using various acid sources for different times, and then the exchanged areas are wet etched with a mixture of hydrofluoric acid and nitric acid to reveal ridge structures for optical waveguides. The aspect ratio and the surface roughness are measured by using scanning electron microscopy and atomic force microscopy, respectively. Secondary ion mass spectrometer is then used to explore the hydrogen ion concentration. Experimental results show the proposed method can be successfully used to fabricate better ridge structures for optical waveguides.oreover, the proposed method is used to fabricate an S-bend ridge waveguide structure. The measured transmission efficiencies show optical waves can be more confined, which is advantageous for the improvement of integrated optical waveguides.
Subjects
gamma ray
proton exchange
wet etching
ridge structure
transmission
Type
thesis
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