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College of Engineering / 工學院
Mechanical Engineering / 機械工程學系
Low-temperature embossing technique for fabrication of large-area polymeric microlens array with supercritical carbon dioxide
Details
Low-temperature embossing technique for fabrication of large-area polymeric microlens array with supercritical carbon dioxide
Journal
Microelectronic Engineering
Journal Volume
87
Pages
2620–2624
Date Issued
2010
Author(s)
Jing-Tang Wu
Ying-Ta Chu
Sen-Yeu Yang
Chen-Chung Li
SEN-YEU YANG
URI
http://iopscience.iop.org/0960-1317/20/7/075023
https://scholars.lib.ntu.edu.tw/handle/123456789/587627
Type
journal article
