Development and traceability of a multi-functional microscope
Journal
Proceedings of SPIE - The International Society for Optical Engineering
Journal Volume
4401
Pages
207-216
Date Issued
2001
Author(s)
Chen, W.-J.
Lee, C.-K.
Lua, S.-S.
Chang, Y.-J.
Chang, Y.-C.
Chang, C.-Y.
Shiue, S.-C.
Lee, S.-S.
Liou, H.-C.
Abstract
A multi-functional microscope named Morphininscope, which was designed to switch between various measurement functions by simply rotating its turret or turning on some sub-systems, was presented. Some of the various built-in functions of this microscope, including a confocal microscope, a photon-tunneling microscope, a laser based phase-shifting interferometry microscope, a Linnik interference microscope, and an ellipsometer, etc. are examined. The opportunity to bring traceability to thin-film or nano-materials metrology, which is an issue under extensive investigations now, offered by the multi-functional microscope were also detailed. Design thinking, optical and opto-mechanical configurations adopted, and experimental results of this newly multi-functional microscope were examined. Measurement of a grating surface, the real and the imaginary complex refractive indices, and the corrected surface profile of an inhomogeneous specimen were used to demonstrate the performance and advantages of this type of multi-functional microscope. Potential to achieve and transfer traceability of the primary standard in Morphinscope was also discussed.
SDGs
Type
conference paper