Spectroscopic characterization of Si/Mo thin-film stack at extreme ultraviolet range

Journal

Optics Letters

Journal Volume

43

Pages

27919

Date Issued

2018

Author(s)

Y. Y. Li

Y. W. Lee

T. S. Ho

J. H. Wang

I C. Wu

T. W. Hsu

Y. T. Chen

S. L. Huang

SHENG-LUNG HUANG

DOI

10.1364/ol.43.004029

URI

https://scholars.lib.ntu.edu.tw/handle/123456789/429662

Type

journal article