Effects of Annealing Temperature and Nitrogen Content on Effective Work Function of Tungsten Nitride

Journal

IEEE Electron Device Letters

Journal Volume

40

Journal Issue

8

Pages

1237-1240

Date Issued

2019

Author(s)

Huang, C.-H.

Tsai, C.-E.

Chen, Y.-R.

DOI

10.1109/LED.2019.2922249

URI

https://www.scopus.com/inward/record.url?eid=2-s2.0-85069842098&partnerID=40&md5=e2b622d56d3bdf64b6041c5325cee628

https://scholars.lib.ntu.edu.tw/handle/123456789/549179

Type

journal article