Optical properties of gallium oxide thin films
Journal
Applied Physics Letters
Journal Volume
81
Journal Issue
2
Pages
250-252
Date Issued
2002
Author(s)
Abstract
The optical functions of β-Ga2O3 thin films have been determined by ellipsometry from 0.74-5 eV. Several electron-beam evaporated and rf magnetron sputtered films of different thicknesses were investigated using a multisample technique. Refractive index values comparable to those of bulk material are found. Cauchy dispersion model fits yield a high-frequency dielectric constant ε∞ of 3.57. Above 4.7 eV a direct absorption edge is observed. © 2002 American Institute of Physics.
Type
journal article