An Intelligent 3D-AFM Scanning Process Based on Online Probe Rotation and Adaptive Speed Strategy
Journal
IEEE Transactions on Nanotechnology
Journal Volume
24
Start Page
264
End Page
276
ISSN
1536-125X
1941-0085
Date Issued
2025
Author(s)
SDGs
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Type
journal article