A Novel Design of Piezo-driven Dual-Dimension Optical Scanning Mechanism

Resource

The Review of Scientific Instruments 69 (9): 3277-3282

Journal

The Review of Scientific Instruments

Journal Volume

69

Journal Issue

9

Pages

3277-3282

Date Issued

1998-09

Date

1998-09

Author(s)

Chang, S. H.

Tung, Y. C.

URI

Type

journal article

File(s)

Name

10.pdf

Size

110.34 KB

Format

Adobe PDF

Checksum

(MD5):fabc14139bdd1996fb4d6a46c5fcd7f3