Fabrication of Diffractive Optical Elements Using the CMOS Process

Resource

J. Micromechanics and Microengineering 12: 21-25

Journal

Journal of Micromechanics and Microengineering

Pages

21-25

Date Issued

2002

Date

2002

Author(s)

Dai, Ching-Liang

Chen, Hung-Lin

Lee, Chi-Yuan

DOI

URI

File(s)

Name

04.pdf

Size

672.9 KB

Format

Adobe PDF

Checksum

(MD5):bb83a9c84a0565f536f9ccd66e67c7d1