The Design and Fabrication of Micro Electret Power Harvester
Date Issued
2011
Date
2011
Author(s)
Chung, Cheng-En
Abstract
In this work, a micro electret power harvester using electret film has been developed. The harvester is combined with top and the bottom parts. The top structure is composed of two side silicon springs and the middle proof mass with the collecting stripped electrode. The bottom structure is Parylene C electret with the ground stripped electrode on silicon substrate. By using the high aspect ratio spring structure of silicon, the harvester could vibrate at the relatively low frequency and have the large amplitude. As for the electret film, we use Parylene C electret because its surface charge density is 3.26 mC/m2 and it is higher than COC/S2C6, Teflon Af and Parylene N electret after six-day charge decay. With the present power harvester, 160.86 nW is obtained at 189.6 Hz, 0.25 g. The theory of the electret power harvester model with horizontal oscillation is also presented.
Subjects
MEMS
Power Harvesting
Electrostatics
Electret
Corona Discharging
Type
thesis
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