Indirect Enhancement of ALD Thin-Film Properties Induced by the ECAP Modification of an As-Extruded Mg-Ca Alloy
Journal
Micromachines
Series/Report No.
Micromachines
Journal Volume
15
Journal Issue
8
Start Page
1006
ISSN
2072-666X
Date Issued
2024-08-03
Author(s)
DOI
10.3390/mi15081006
Abstract
The purpose of this study is to investigate the indirect effects on the properties of ZrO2 films deposited by atomic layer deposition (ALD) when an Mg-Ca alloy is modified through equal-channel angular pressing (ECAP) following extrusion. The study aims to understand how the increase in CaO content in the native oxide layer of the Mg-Ca alloy influences the crystallinity and defect density of the ZrO2 film. Consequently, the corrosion protection performance of the ZrO2 film is enhanced by 1.2 to 1.5 times. A reduction in the anti-scratch property of the ZrO2 film was also observed, with a critical load reduction of 34 μN. This research provides a detailed analysis of the modifications induced by ECAP on the as-extruded Mg-Ca alloy and its subsequent impact on the properties of the ZrO2 film.
Subjects
atomic layer deposition
corrosion protection
equal-channel angular pressing
indirect film improvement
magnesium–calcium alloy
Publisher
MDPI AG
Type
journal article