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College of Electrical Engineering and Computer Science / 電機資訊學院
Electrical Engineering / 電機工程學系
Translating fab cycle time and output targets into production control requirements for tool groups
Details
Translating fab cycle time and output targets into production control requirements for tool groups
Resource
Semiconductor Manufacturing Technology Workshop, 2000
Journal
2000 Semiconductor Manufacturing Technology Workshop
Pages
73-83
Date Issued
2000
Author(s)
Hu, M.-D.
SHI-CHUNG CHANG
DOI
10.1109/SMTW.2000.883087
URI
http://www.scopus.com/inward/record.url?eid=2-s2.0-84963753730&partnerID=MN8TOARS
http://scholars.lib.ntu.edu.tw/handle/123456789/289972
Type
conference paper
File(s)
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Name
00883087.pdf
Size
700.92 KB
Format
Adobe PDF
Checksum
(MD5):d7b82aaf4edb81c6070fc34f82f6c326
