STI Mechanical Stress Induced Subthreshold Kink Effect of 40nm PD SOI NMOS Devices

Journal

IEEE International Semicondcutor Device Research Symp (ISDRS)

Date Issued

2007-12

Author(s)

I. Lin

V. Su

J. B. kuo

M. Ma

C. T. Tsai

C. S. Yeh

D. Chen

DOI

10.1109/isdrs.2007.4422325

URI

http://scholars.lib.ntu.edu.tw/handle/123456789/333623

Type

conference paper